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This Standard is provided specifically for the communication between supply channels as well as between manufacturers and consumers
SEMI E112 — Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store 6 Inch Reticles
그 내용이 가지는 의미와 장비에서 지원하는 데이터가 어떤 인터페이스로 관리되는지를 정의한다
The Document does not address safety aspects associated with the prolonged storage of gases
5 The more suitable measurement process consists of an alternative mounting for wafers with high aspect ratios and the use of high resolution measurements
D01800 - SEMI D18 - FPD基板水平搬送用および保管用カセット仕様 Revision:SEMI D18-0299E - Inactive This Standard is provided specificallyFlat Panel Display Equipment CommitteeNorth American Flat Panel Display Committee1998815North American Regional Standards Committee19989www. semi. org19992 E 2000105 FPD0. 7 mm1. 1 mm Referenced SEMI Standards SEMI D3 Quality Area Specification for Flat Panel Display Substrates SEMI D5 Standard Size for Flat Panel Display Substrates SEMI D6 Standard Edge Length and Thickness for Flat Panel Display Mask Substrates SEMI D9 Definitions for Flat Panel
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